The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has an additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via a laser beam. One axis is motorised – for scanning, second is manual – for adjusting. An additional Z axis is used to set up the transfer position for target transferring via the Load Lock Chamber. The Z movement can be motorised or manual. The computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.
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Targets holder: PTS
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Clik here to view. Base pressure: 10-10 mbar
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Clik here to view. Possibility of fixing targets with irregular shapes
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Clik here to view. Target sizes: 1″ or 2″, standard target thickness: 0.5 – 10 mm
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Clik here to view. Continuous, individual rotation of targets
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Clik here to view. Radial scan, automatic control
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Clik here to view. Target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling
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Clik here to view. Target holders are transferable to the load-lock chamber (or storage) for quick replacement
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Clik here to view. Water cooling system
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