Slit unit manipulators
Single-axis manipulators for adjusting the shape of the cross-sectional area of the synchrotron beam. Horizontal and vertical shutters, positioned inside the vacuum chamber, are translated via a...
View ArticleR2/R3 tilt modules (combined with XY stages)
Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range. Integration with XY stage (through a common bellows) is recommended for best motion range....
View ArticleDifferentially pumped rotary feedthroughs
Provides 360° of continuous rotary freedom through the vacuum wall of a UHV system The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on...
View Article2-5 axes PLD targets manipulators
The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator...
View Article1-4 axes sputtering manipulators
Prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6 inch sample holder) positioner and allows precise angular position of substrate...
View ArticleZ chain slides
Provides short strokes of Z travel with a wide range of bellows I.D. The slide is provided through three lead screws which are synchronously driven by a drive chain. Manual operation is provided by a...
View Article1-4 axes MBE manipulators
Prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise...
View ArticleXY stages
Precision, high rigidity UHV specimen translator having X and Y motions. The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any...
View ArticleSlit unit manipulators
Single-axis manipulators for adjusting the shape of the cross-sectional area of the synchrotron beam. Horizontal and vertical shutters, positioned inside the vacuum chamber, are translated via a...
View ArticleMirror/gratings system manipulators
Multi-axes, precise manipulators determining the correct direction of the synchrotron beam. Vacuum mirror chambers are situated along the synchrotron beamline. Mirrors are located inside the chamber...
View Article1-4 axes sputtering manipulators
Prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6 inch sample holder) positioner and allows precise angular position of substrate...
View ArticleZ chain slides
Provides short strokes of Z travel with a wide range of bellows I.D. The slide is provided through three lead screws which are synchronously driven by a drive chain. Manual operation is provided by a...
View Article1-4 axes MBE manipulators
Prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise...
View ArticleZ slides
Precise UHV specimen translator having Z motion. The travelling flange can be chosen depending on the type of accessories. The translator is suitable for vertical or horizontal mounting. The Z slides...
View ArticleXY stages
Precision, high rigidity UHV specimen translator having X and Y motions. The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any...
View ArticleSlit unit manipulators
Single-axis manipulators for adjusting the shape of the cross-sectional area of the synchrotron beam. Horizontal and vertical shutters, positioned inside the vacuum chamber, are translated via a...
View ArticleGoniometers
The precision, 2-axes goniometer stage is designed specifically for anti-clash and sample access. Both axes are fitted with vernier readouts of 0.1° precision. Full 360° R1 rotation in the horizontal...
View ArticleHigh pressure cell manipulators
Specially designed 3-axes high pressure cell manipulator with IR laser heating possibility (double Z axes: one for gas cell proper placement and second for high precise sample positioning). For easy...
View ArticleR2/R3 tilt modules (combined with XY stages)
Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range. Integration with XY stage (through a common bellows) is recommended for best motion range....
View Article1-4 axes MBE manipulators
Prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise...
View Article